Automatic UV irradiation tool for wafers and dicing frames.

Proteus Frame is an automated tool to irradiate wafers or dicing frames with UV, according to the needed process.

Applicable processess include memory erasure for testing purposes, UV tape deactivation for grinding and dicing applications.

The Proteus UV is a tool used to irradiate wafers or dicing frames with UV, according to the needs of the application.

Applications include reducing the pull strength of UV tapes used for grinding or dicing and erasing ROM memories, for testing purposes.

The Proteus UV is available with two different types of UV lamps depending upon the requirement. UV tapes are deactivated with a low pressure, 360 nm lamp source. Memory erasure must be performed with a higher pressure, 240 nm UVC grid lamp.

This advanced technology tool is computer controlled and features automated handling to load and unload wafers or frames from a cassette into the irradiation chamber.

The system includes laser mapping for wafer detection. This feature is ideal for thin wafer handling.

The control interface is touch screen based and is extremely simple and user friendly, featuring cycle control plus recipe selection and editing. No special operator training is required.